High-speed imprinting on plastic optical fibers using cylindrical mold with hybrid microstructures : Nanolithography 2012

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Bibliographic Details
Published inMicroelectronic engineering Vol. 110; pp. 156 - 162
Main Authors MEKARU, Harutaka, OHTOMO, Akihiro, TAKAGI, Hideki, KOKUBO, Mitsunori, GOTO, Hiroshi
Format Conference Proceeding
LanguageEnglish
Published Amsterdam Elsevier 2013
Subjects
Applied sciences
Circuit properties
Cutting
Electric, optical and optoelectronic circuits
Electronics
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Integrated optics. Optical fibers and wave guides
Mechanical instruments, equipment and techniques
Metals. Metallurgy
Micro- and nanoelectromechanical devices (mems/nems)
Micromechanical devices and systems
Optical and optoelectronic circuits
Physics
Production techniques
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Integrated optics
Positioning
Plastic optical fiber
Reel-to-reel process
Roller nanoimprint
Methyl methacrylate polymer
Electronic circuit
Polishing
E-textile
Micromachine
Coatings
Cutting
Microelectronic fabrication
Lamellar structure
High speed
Radiation effect
Cylindrical mold
MEMS
Manufacturing
Copper
Photolithography
Microelectromechanical device
Nickel alloy
Intelligent system
Optical fiber
Photoresist
Forming tool
Mask
Weaving guide
Cylindrical shape
Coated material
Ultraviolet radiation
Rectangular cross section
Positive resist
Plastics
Microstructure
Electroless plating
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ISSN:0167-9317
1873-5568