One-dimensional, self-organized Si dots grown by pulsed laser melting of a-Si :H films

• Published in: Journal of non-crystalline solids Vol. 227-30; pp. 934 - 937
• Main Authors: KUNJI CHEN, GUIPENG LUO, MINGXIANG WANG, XIANG GAO, JUN XU, MU WANG, XINFAN HUANG, NAIBEN MING
• Format: Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier 1998
• Subjects: Applied sciences; Cross-disciplinary physics: materials science; rheology; Electronics; Exact sciences and technology; Liquid phase epitaxy; deposition from liquid phases (melts, solutions, and surface layers on liquids); Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Microelectronic fabrication (materials and surfaces technology); Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology; Physics; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Melting; Semiconductor materials; Films; Quantum dots; Physical radiation effects; Crystallization; Experimental study; Pulsed lasers; Self organization; Nonmetals; Amorphous hydrogenated material; Silicon; Nanocrystal
• ISSN: 0022-3093; 1873-4812