Piezoresistive Position Sensing for the Detection of Hysteresis and Dielectric Charging in CMOS-MEMS Variable Capacitors SPECIAL ISSUE ON 2010 INTERNATIONAL MICROWAVE SYMPOSIUM
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| Published in | IEEE transactions on microwave theory and techniques Vol. 58; no. 12; pp. 3961 - 3970 |
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| Main Authors | , , |
| Format | Journal Article |
| Language | English |
| Published |
New York, NY
Institute of Electrical and Electronics Engineers
2010
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| Subjects | |
| Online Access | Get full text |
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| Author | ZAHIROVIC, Nino MING YU MANSOUR, Raafat R |
|---|---|
| Author_xml | – sequence: 1 givenname: Nino surname: ZAHIROVIC fullname: ZAHIROVIC, Nino organization: Department of Electrical and Computer Engineering, University of Waterloo, Waterloo, ON, N2L 3G1, Canada – sequence: 2 givenname: Raafat R surname: MANSOUR fullname: MANSOUR, Raafat R organization: Department of Electrical and Computer Engineering, University of Waterloo, Waterloo, ON, N2L 3G1, Canada – sequence: 3 surname: MING YU fullname: MING YU organization: COM DEV International, Ltd., Cambridge, ON N1R 7H6, Canada |
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| Issue | 12 |
| Keywords | Closed loop Tunable circuit Multifunctionality MEMS for multifunctional wireless communications systems Microsensor Wireless telecommunication Polycrystal MEMS components and techniques microsensors Variable capacitor tunable microwave circuits Complementary MOS technology Telecommunication system Position sensor Position measurement Microwave circuit Microelectromechanical systems (MEMS) Reliability MEMS reliability Microelectromechanical device Piezoresistance |
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| SubjectTerms | Applied sciences Circuit properties Design. Technologies. Operation analysis. Testing Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Integrated circuits Micro- and nanoelectromechanical devices (mems/nems) Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices |
| Subtitle | SPECIAL ISSUE ON 2010 INTERNATIONAL MICROWAVE SYMPOSIUM |
| Title | Piezoresistive Position Sensing for the Detection of Hysteresis and Dielectric Charging in CMOS-MEMS Variable Capacitors |
| Volume | 58 |
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