Piezoresistive Position Sensing for the Detection of Hysteresis and Dielectric Charging in CMOS-MEMS Variable Capacitors SPECIAL ISSUE ON 2010 INTERNATIONAL MICROWAVE SYMPOSIUM

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Bibliographic Details
Published inIEEE transactions on microwave theory and techniques Vol. 58; no. 12; pp. 3961 - 3970
Main Authors ZAHIROVIC, Nino, MANSOUR, Raafat R, MING YU
Format Journal Article
LanguageEnglish
Published New York, NY Institute of Electrical and Electronics Engineers 2010
Subjects
Applied sciences
Circuit properties
Design. Technologies. Operation analysis. Testing
Electric, optical and optoelectronic circuits
Electronics
Exact sciences and technology
Integrated circuits
Micro- and nanoelectromechanical devices (mems/nems)
Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Closed loop
Tunable circuit
Multifunctionality
MEMS for multifunctional wireless communications systems
Microsensor
Wireless telecommunication
Polycrystal
MEMS components and techniques
microsensors
Variable capacitor
tunable microwave circuits
Complementary MOS technology
Telecommunication system
Position sensor
Position measurement
Microwave circuit
Microelectromechanical systems (MEMS)
Reliability
MEMS reliability
Microelectromechanical device
Piezoresistance
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ISSN:0018-9480
1557-9670