Highly sensitive in-situ monitoring of mechanical stress during ion-beam-assisted deposition of thin titanium nitride films
Saved in:
Published in | Surface & coatings technology Vol. 103-04; pp. 281 - 286 |
---|---|
Main Authors | , , , , , |
Format | Conference Proceeding |
Language | English |
Published |
Lausanne
Elsevier
1998
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
ISSN: | 0257-8972 1879-3347 |
---|