Laser-induced backside wet etching of fluoride and sapphire using picosecond laser pulses Laser Processing
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Published in | Applied physics. A, Materials science & processing Vol. 101; no. 2; pp. 399 - 404 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
Heidelberg
Springer
2010
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Subjects | |
Online Access | Get full text |
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ISSN: | 0947-8396 1432-0630 |
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