Surface characteristics of parylene-C films in an inductively coupled O2/CF4 gas plasma
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Published in | Thin solid films Vol. 518; no. 22; pp. 6378 - 6381 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | Russian |
Published |
Amsterdam
Elsevier
2010
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Online Access | Get full text |
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ISSN: | 0040-6090 1879-2731 |
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