Laser-induced extreme UV radiation sources for manufacturing next-generation integrated circuits

Saved in:

Bibliographic Details
Published in	Quantum electronics (Woodbury, N.Y.) Vol. 39; no. 10; pp. 967 - 972
Main Authors	BORISOV, V. M, VINOKHODOV, A. Yu, IVANOV, A. S, KIRYUKHIN, Yu. B, MISHCHENKO, V. A, PROKOF'EV, A. V, KHRISTOFOROV, O. B
Format	Journal Article
Language	Russian
Published	London Kvantovaya Elektronika 2009 Turpion
Online Access	Get full text

Loading…

More Information
ISSN:	1063-7818