Non-linear dissolution of amorphous arsenic sulfide-selenide photoresist films

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Bibliographic Details
Published inApplied physics. A, Materials science & processing Vol. 97; no. 1; pp. 109 - 114
Main Authors LYUBIN, V, ARSH, A, KLEBANOV, M, MANEVICH, M, VARSHAL, J, DROR, R, SFEZ, B, LATYSHEV, A. V, NASIMOV, D. A, EISENBERG, N. P
Format Journal Article
LanguageRussian
Published Heidelberg Springer 2009
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ISSN:0947-8396
1432-0630