Highly ordered nanopatterns on Ge and Si surfaces by ion beam sputtering : SURFACE NANOPATTERNS INDUCED BY ION-BEAM SPUTTERING

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Bibliographic Details
Published inJournal of physics. Condensed matter Vol. 21; no. 22
Main Authors ZIBERI, B, CORNEJO, M, FROST, F, RAUSCHENBACH, B
Format Journal Article
LanguageEnglish
Published Bristol Institute of Physics 2009
Subjects
Cross-disciplinary physics: materials science; rheology
Exact sciences and technology
Materials science
Methods of nanofabrication
Nanoscale pattern formation
Physics
Atomic force microscopy
Degrees of freedom
Nanopatterning
Ion beam sputtering
Ordering
Germanium
Ripples
Silicon
Incidence angle
Nanostructures
Surface topography
Erosion
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ISSN:0953-8984
1361-648X