Development of technological sources of gas ions on the basis of hollow-cathode glow discharges
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Published in | Surface & coatings technology Vol. 96; no. 1; pp. 81 - 88 |
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Main Authors | , , , |
Format | Conference Proceeding |
Language | Russian |
Published |
Lausanne
Elsevier
1997
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Online Access | Get full text |
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ISSN: | 0257-8972 1879-3347 |
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