Optimization of furnace design and growth parameters for Si Cz growth, using numerical simulation
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Published in | Journal of crystal growth Vol. 310; no. 7-9; pp. 2185 - 2191 |
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Main Authors | , , , , |
Format | Journal Article |
Language | Russian |
Published |
Amsterdam
Elsevier
2008
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Online Access | Get full text |
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ISSN: | 0022-0248 1873-5002 |
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