Development of X-shaped filtered-arc-deposition (X-FAD) apparatus and DLC/Cr film preparation Electrical discharges in vacuum

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Bibliographic Details
Published inIEEE transactions on plasma science Vol. 35; no. 4; pp. 1014 - 1019
Main Authors TANOUE, Hideto, HIKOSAKA, Hiroki, IWASAKI, Yasuhiro, TAKIKAWA, Hirofumi, SAKAKIBARA, Tateki, HASEGAWA, Yushi
Format Journal Article
LanguageEnglish
Published New York, NY Institute of Electrical and Electronics Engineers 2007
Subjects
Discharge in vacuum
Electric discharges
Exact sciences and technology
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Hydrogen
Electric discharges
Diamonds
Experimental device
XRD
Carbon
Vacuum systems
diamond-like carbon (DLC)
Bias voltage
X-shape filtered-arc-deposition (X-FAD) system
chromium (Cr) film
hydrogen-free tetrahedral amorphous carbon (ta-C)
Binding interlayer
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ISSN:0093-3813
1939-9375