Variable frequency microwave and convection furnace curing of polybenzoxazole buffer layer for GaAs JBT technology
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Published in | IEEE transactions on semiconductor manufacturing Vol. 20; no. 3; pp. 323 - 332 |
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Main Authors | , , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
New York, NY
Institute of Electrical and Electronics Engineers
2007
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Subjects | |
Online Access | Get full text |
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ISSN: | 0894-6507 1558-2345 |
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