Integration of enhancement and depletion-mode AlGaN/Gan MIS-HEFTs by fluoride-based plasma treatment
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Published in | Physica status solidi. A, Applications and materials science (Print) Vol. 204; no. 6; pp. 2023 - 2027 |
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Main Authors | , , , , |
Format | Conference Proceeding |
Language | English |
Published |
Berlin
Wiley-VCH
2007
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Subjects | |
Online Access | Get full text |
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ISSN: | 1862-6300 1862-6319 |
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