Measurement of angular emission trajectories for magnetron-sputtered tantalum : Microstructures and textures of films and coatings and refractory metals in electronic applications
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Published in | Journal of electronic materials Vol. 34; no. 12; pp. 1474 - 1479 |
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Main Authors | , |
Format | Conference Proceeding |
Language | English |
Published |
New York, NY
Institute of Electrical and Electronics Engineers
2005
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Subjects | |
Online Access | Get full text |
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ISSN: | 0361-5235 1543-186X |
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