Plasma polymers and plasma etching group of the Centro di Studio per la Chimica dei Plasmi, Bari, Italy
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Published in | Plasmas and polymers Vol. 3; no. 3; pp. 177 - 192 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
Dordrecht
Kluwer
1998
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Subjects | |
Online Access | Get full text |
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ISSN: | 1084-0184 1572-8978 |
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