Moisture-resistant properties of SiNx films prepared bv PECVD
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Published in | Thin solid films Vol. 333; no. 1-2; pp. 71 - 76 |
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Main Authors | , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Lausanne
Elsevier Science
1998
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Subjects | |
Online Access | Get full text |
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ISSN: | 0040-6090 1879-2731 |
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