Industrial applications of spectroscopic ellipsometry

Saved in:
Bibliographic Details
Published inThin solid films Vol. 455-56; pp. 772 - 778
Main Author TOMPKINS, Harland G
Format Conference Proceeding
LanguageEnglish
Published Lausanne Elsevier Science 2004
Subjects
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Optical instruments, equipment and techniques
Physics
Polarimeters and ellipsometers
Scanning electron microscopy
Spectroscopic ellipsometry
Industrial application
Refractive index
Polymer
Infrared spectra
Experimental study
Thin films
Thickness
Glass substrate
Biofilm
Fourier transform spectra
Polymers
Thin metal films
Organic compounds
Online AccessGet full text

Cover

More Information
ISSN:0040-6090
1879-2731