A study on the synthesis and formation behavior of nanostructured TiN films by copper doping

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Bibliographic Details
Published inSurface & coatings technology Vol. 177-78; pp. 404 - 408
Main Authors MYUNG, Hyun S, HAN, Jeon G, BOO, Jin H
Format Conference Proceeding
LanguageEnglish
Published Lausanne Elsevier 2004
Subjects
Applied sciences
Exact sciences and technology
Metals. Metallurgy
Production techniques
Surface treatment
Coatings
Surface treatment
Thin film
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ISSN:0257-8972
1879-3347