Detection in the ppm range and high-resolution depth profiling with the new SNMS instrument INA-X : Vacuum based science and technology
Saved in:
Published in | Applied physics. A, Materials science & processing Vol. 78; no. 5; pp. 655 - 658 |
---|---|
Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
Berlin
Springer
2004
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
ISSN: | 0947-8396 1432-0630 |
---|