Improved step and flash imprint lithography templates for nanofabrication

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Bibliographic Details
Published inMicroelectronic engineering Vol. 69; no. 2-4; pp. 412 - 419
Main Authors RESNICK, D. J, MANCINI, D, DAUKSHER, W. J, NORDQUIST, K, BAILEY, T. C, JOHNSON, S, SREENIVASAN, S. V, EKERDT, J. G, WILLSON, C. G
Format Conference Proceeding
LanguageRussian
Published Amsterdam Elsevier Science 2003
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ISSN:0167-9317
1873-5568