Production and control of planar microwave plasmas for materials processing Special issue containing papers arising from the 25th International Conference on Phenomena in Ionized Gases, Nagoya, Japan, 17-22 July 2001

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Bibliographic Details
Published inPlasma sources science & technology Vol. 11; no. 3A; pp. A178 - A190
Main Authors GANACHEV, Ivan P, SUGAI, Hideo
Format Journal Article
LanguageEnglish
Published Bristol Institute of Physics 2002
Subjects
Exact sciences and technology
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma applications
Plasma production and heating
Plasma sources
Design
Standing waves
Plasma
Reviews
Collisionless plasma
Plasma production
Plasma assisted processing
Theoretical study
Plasma electromagnetic wave propagation
Plasma heating
Plasma sources
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ISSN:0963-0252
1361-6595