Investigation of intermixing in TiAlN/VN nanoscale multilayer coatings by energy-filtered TEM

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Bibliographic Details
Published inSurface & coatings technology Vol. 151-52; pp. 209 - 213
Main Authors MEIDIA, H, CULLIS, A. G, SCHÖNJAHN, C, MÜNZ, W. D, RODENBURG, J. M
Format Conference Proceeding
LanguageEnglish
Published Lausanne Elsevier 2002
Subjects
Condensed matter: structure, mechanical and thermal properties
Electron, ion, and scanning probe microscopy
Exact sciences and technology
Physics
Structure of solids and liquids; crystallography
Transmission, reflection and scanning electron microscopy(including ebic)
Characterization
Thin films
Transmission electron microscopy
Vanadium nitrides
Multilayer
Ternary compounds
Aluminium nitrides
Nanostructures
Experimental study
Coatings
Titanium nitrides
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ISSN:0257-8972
1879-3347