X-ray fluorescence analysis of Ge{sub 1–x}Se{sub x}, As{sub 1–x}Se{sub x}, and Ge{sub 1–x–y}As{sub y}Se{sub x} glasses using electronic excitation

X-ray fluorescence analysis with fluorescence excitation by an electron beam with an energy of 30 kV is applied to determine the germanium, arsenic, and selenium contents in Ge{sub 1–x}Se{sub x}, As{sub 1–x}Se{sub x}, and Ge{sub 1–x–y}As{sub y}Se{sub x} glassy alloys. Using calibration dependences,...

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Bibliographic Details
Published inSemiconductors (Woodbury, N.Y.) Vol. 49; no. 10
Main Authors Terukov, E. I., Seregin, P. P., Marchenko, A. V., Zhilina, D. V., Bobokhuzhaev, K. U.
Format Journal Article
LanguageEnglish
Published United States 15.10.2015
Subjects
CALIBRATION
CONCENTRATION RATIO
ELECTRON BEAMS
EXCITATION
FLUORESCENCE
GERMANIUM ARSENIDES
GERMANIUM SELENIDES
GLASS
LAYERS
MATERIALS SCIENCE
METALLIC GLASSES
SURFACES
X-RAY FLUORESCENCE ANALYSIS
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Summary:X-ray fluorescence analysis with fluorescence excitation by an electron beam with an energy of 30 kV is applied to determine the germanium, arsenic, and selenium contents in Ge{sub 1–x}Se{sub x}, As{sub 1–x}Se{sub x}, and Ge{sub 1–x–y}As{sub y}Se{sub x} glassy alloys. Using calibration dependences, the quantitative composition of the glasses is determined with an accuracy of ±0.0002 for parameters x and y in a surface layer ∼0.1 µm deep.
ISSN:1063-7826
1090-6479
DOI:10.1134/S1063782615100255