Quantitative Assessment and Measurement of X-ray Detector Performance and Solid Angle in the Analytical Electron Microscope

A wide range of X-ray detectors and geometries are available today on transmission/scanning transmission analytical electron microscopes. While there have been numerous reports of their individual performance, no single experimentally reproducible metric has been proposed as a basis of comparison be...

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Bibliographic Details
Published inMicroscopy and microanalysis Vol. 28; no. 1
Main Author Zaluzec, Nestor J.
Format Journal Article
LanguageEnglish
Published United States Microscopy Society of America (MSA) 09.12.2021
Subjects
AEM
OTHER INSTRUMENTATION
SDD
Si(Li)
Solid Angle
XEDS
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Summary:A wide range of X-ray detectors and geometries are available today on transmission/scanning transmission analytical electron microscopes. While there have been numerous reports of their individual performance, no single experimentally reproducible metric has been proposed as a basis of comparison between the systems. In this paper, we detail modeling, experimental procedures, measurements, and specimens which can be used to provide a manufacturer-independent assessment of the performance of an analytical system. Using these protocols, the geometrical collection efficiency, system peaks, and minimum detection limits can be independently assessed and can be used to determine the best conditions to conduct modern hyperspectral and/or spectrally resolved tomographic analyses for an individual instrument. Here, a simple analytical formula and specimen is presented which after suitable system calibrations can be used to experimentally determine the X-ray detector solid angle.
Bibliography:AC02-06CH11357
USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities Division
USDOE Laboratory Directed Research and Development (LDRD) Program
ISSN:1431-9276
1435-8115