Arrayed Tip based Pattern Lithography with Built-in Capacitive Proximal Leveling Sensor

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Bibliographic Details
Published inBiuletyn Uniejowski Vol. 52; no. 5; pp. 239 - 245
Main Author Yoonsoo Han(한윤수)
Format Journal Article
LanguageEnglish
Published 한국표면공학회 2019
Subjects
arrayed tip
capacitive
lithography
leveling
polymer pen
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ISSN:1225-8024
2299-8403