증착 입사각에 따른 금속박막의 물성 변화

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Bibliographic Details
Published inBiuletyn Uniejowski Vol. 20; no. 2; pp. 43 - 48
Main Authors 진희창(H.C. Jin), 조현춘(H.C. Cho), 백수현(S.H. Paek)
Format Journal Article
LanguageKorean
Published 한국표면공학회 1987
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ISSN:1225-8024
2299-8403