나노구조 금속 박막의 레이저 직접 패터닝에 관한 연구
We here describe the laser-direct patterning of nanostructured metal thin films. This method involves light-matter interaction in which a pulsed laser beam impinging on the film generates a thermoelastic force that plays a role to detach the film from the substrate or underlying layers. A moderate c...
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| Published in | 대한금속·재료학회지, 48(2) pp. 163 - 168 |
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| Main Authors | , , , , |
| Format | Journal Article |
| Language | Korean |
| Published |
대한금속·재료학회
01.02.2010
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| Subjects | |
| Online Access | Get full text |
| ISSN | 1738-8228 2288-8241 |
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| Abstract | We here describe the laser-direct patterning of nanostructured metal thin films. This method involves light-matter interaction in which a pulsed laser beam impinging on the film generates a thermoelastic force that plays a role to detach the film from the substrate or underlying layers. A moderate cohesion of the nanostructured film enables localized desorption of the material upon irradiation by a spatiallymodulated laser beam, giving good fidelity with the transfered pattern. This photoresist-free process provides a simple high-resolution scheme for patterning metal thin films. KCI Citation Count: 10 |
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| AbstractList | We here describe the laser-direct patterning of nanostructured metal thin films. This method involves light-matter interaction in which a pulsed laser beam impinging on the film generates a thermoelastic force that plays a role to detach the film from the substrate or underlying layers. A moderate cohesion of the nanostructured film enables localized desorption of the material upon irradiation by a spatiallymodulated laser beam, giving good fidelity with the transfered pattern. This photoresist-free process provides a simple high-resolution scheme for patterning metal thin films. KCI Citation Count: 10 |
| Author | 유형근 이명규 이형재 신현권 임기수 |
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| DocumentTitleAlternate | Laser-Direct Patterning of Nanostructured Metal Thin Films |
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| Title | 나노구조 금속 박막의 레이저 직접 패터닝에 관한 연구 |
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