나노구조 금속 박막의 레이저 직접 패터닝에 관한 연구

• Published in: 대한금속·재료학회지, 48(2) pp. 163 - 168
• Main Authors: 신현권, 이형재, 유형근, 임기수, 이명규
• Format: Journal Article
• Language: Korean
• Published: 대한금속·재료학회 01.02.2010
• Subjects: 재료공학
• ISSN: 1738-8228; 2288-8241

We here describe the laser-direct patterning of nanostructured metal thin films. This method involves light-matter interaction in which a pulsed laser beam impinging on the film generates a thermoelastic force that plays a role to detach the film from the substrate or underlying layers. A moderate cohesion of the nanostructured film enables localized desorption of the material upon irradiation by a spatiallymodulated laser beam, giving good fidelity with the transfered pattern. This photoresist-free process provides a simple high-resolution scheme for patterning metal thin films. KCI Citation Count: 10