SnO2-ZnO를 이용한 가스 센서의 포름알데히드 가스 감지특성
A micro gas sensor for formaldehyde (HCHO) gas was fabricated by using MEMS (Micro Electro Mechanical System) technology and the sol-gel process. The sensing materials of the SnO2-ZnO system were synthesized by the sol-gel method. The crystal structure and thermal analysis of the SnO2-ZnO were chara...
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| Published in | 대한금속·재료학회지, 48(2) pp. 169 - 174 |
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| Main Authors | , , |
| Format | Journal Article |
| Language | Korean |
| Published |
대한금속·재료학회
01.02.2010
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| Subjects | |
| Online Access | Get full text |
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| Summary: | A micro gas sensor for formaldehyde (HCHO) gas was fabricated by using MEMS (Micro Electro Mechanical System) technology and the sol-gel process. The sensing materials of the SnO2-ZnO system were synthesized by the sol-gel method. The crystal structure and thermal analysis of the SnO2-ZnO were characterized by XRD and DSC-TGA. The fabricated gas sensors were tested at various gas concentrations (0.5~5.0 ppm) and different operation temperatures (350~550℃). The SnO2-10 mol%ZnO sensor showed the highest sensitivity (Rs=0.24) for 1.0 ppm-formaldehyde at 500℃ and response time (90% saturation time) was within 20 seconds. KCI Citation Count: 6 |
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| Bibliography: | G704-000085.2010.48.2.009 |
| ISSN: | 1738-8228 2288-8241 |