유도결합 플라즈마(ICP) Sputtering에 의한 평판디스플레이(FPD)용 ITO 박막의 저온 증착

KCI Citation Count: 6

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Published in한국표면공학회지, 37(3) pp. 146 - 151
Main Authors 이정중, 주정훈, 구범모, 정승재, 한영훈
Format Journal Article
LanguageKorean
Published 한국표면공학회 01.06.2004
Subjects
기계공학
Online AccessGet full text
ISSN1225-8024
2288-8403

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Abstract KCI Citation Count: 6
AbstractList KCI Citation Count: 6
Author 구범모
주정훈
이정중
한영훈
정승재
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  fullname: 정승재
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  fullname: 한영훈
  organization: (서울대학교)
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DocumentTitleAlternate Low Temperature Deposition of ITO Thin Fims for Flat Panel Displays by ICP Assisted DC Magnetron Sputtering
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SubjectTerms 기계공학
Title 유도결합 플라즈마(ICP) Sputtering에 의한 평판디스플레이(FPD)용 ITO 박막의 저온 증착
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