Commercial Aspects of CVD

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Bibliographic Details
Published inChemical Vapour Deposition - Precursors, Processes and Applications p. 1
Main Authors Jones Anthony C, Hitchman Michael L
Format Book Chapter
LanguageEnglish
Published Royal Society of Chemistry 2009
Subjects
Adhesives & Sealants
Adhesives, Coatings, Sealants & Inks
Electronics & Semiconductors
Materials & Applications
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ISBN:0854044655
9780854044658