Implementation of an Integrated Pressure-sensor System Adapted to the Optimum Sensitivity

An integrated pressure-sensor system was developed using the sensor-conditioning processes, which resulted in the optimum sensitivity of the pressure-sensor through the signal amplification, noise reduction, and level shift. Due to the specified characteristics among the components, such as operatio...

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Bibliographic Details
Published inJournal of semiconductor technology and science Vol. 17; no. 2; pp. 186 - 191
Main Authors Hong, Sung-Hee, Cho, Chun-Hyung
Format Journal Article
LanguageKorean
Published 2017
Subjects
sensor-conditioning
pressure-sensor system
Pressure-sensor
sensor-resolution
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Summary:An integrated pressure-sensor system was developed using the sensor-conditioning processes, which resulted in the optimum sensitivity of the pressure-sensor through the signal amplification, noise reduction, and level shift. Due to the specified characteristics among the components, such as operation range, the sensor output was generally limited compared to the full scale of the reading when coupled with other parts. Devices fabricated exhibited comparable characteristics with higher pressure sensitivity to that of the pressure sensor without sensor-conditioning process. In this work, the sensor resolution was at least enhanced at least by 25% using the sensor-conditioning processes.
Bibliography:KISTI1.1003/JNL.JAKO201715853764046
ISSN:1598-1657