나노포지셔너 개발을 위한 테스트벤치 제작

In this study, a test-bench for developing and verifying a 1- or 2-axis nanopositioner was manufactured. Using this test-bench, adesigned and manufactured flexure stage based on an analysis can configure nanopositioning systems. A breadboard and fixture were fabricated to be equipped with various ty...

Full description

Saved in:
Bibliographic Details
Published in한국생산제조시스템학회지 Vol. 22; no. 3; pp. 593 - 599
Main Authors 권지용, 박근제, 유원진, 이치범, Kwon, Ji Yong, Park, Geun Je, Ryu, Won Jin, Lee, Chibum
Format Journal Article
LanguageKorean
Published 2013
Subjects
Capacitance sensor
Nanopositioner
Test-bench
Flexure stage
Linear encoder
Piezo-actuator
Online AccessGet full text

Cover

More Information
Summary:In this study, a test-bench for developing and verifying a 1- or 2-axis nanopositioner was manufactured. Using this test-bench, adesigned and manufactured flexure stage based on an analysis can configure nanopositioning systems. A breadboard and fixture were fabricated to be equipped with various types of mechanisms and sizes of stages. The test-bench has linear encoders for calibrating sensors and verifying the orthogonality and parasitic motion of 2-axis nested-type nanopositioners. The controller was developed using LabVIEW and a TI microcontroller. A case study that exemplified the test bench for developing a nanopositioner by senior undergraduate students is shown.
Bibliography:KISTI1.1003/JNL.JAKO201319133641135
ISSN:2233-6036
2383-4846