폴리머기판에형성한알루미늄보호막의수분침투특성연구

• Published in: 대한금속재료학회지 Vol. 47; no. 12; pp. 873 - 880
• Main Authors: 최영준, Young Jun Choi, 하상훈, Sang Hoon Ha, 박기정, Ki Jung Park, 최영선, Young Sun Choe, 조영래, Young Rae Cho
• Format: Journal Article
• Language: Korean
• Published: 대한금속재료학회 20.12.2009
• Subjects: barrier Layer; flexible electronic devices; reliability; stacking structure; water vapor transmission rate; WVTR
• ISSN: 1738-8228

Water-vapor permeation through metallic barriers deposited on polymer substrates has been an important technological issue because the performance of the barrier is critical to the reliability of flexible organic devices. For the development of long-lifetime flexible organic devices, two different sets of samples were designed and demonstrated from the viewpoint of the water-vapor transmission rate (WVTR). Aluminum (Al) and polyethylene terephthalate (PET) were chosen for the barrier layer and the polymer substrate, respectively. Two stacking structures, a single-layer (Al/PET) structure and a double-layer (Al/PET/Al) structure, were used for the WVTR measurement. For the single-layer structure, the WVTR decreases as the thickness of the barrier layer increases. Compared to the single-layer sample, the double-layer sample showed superior WVTR performance (by nearly three times) when the total thickness of the Al barrier was greater than 100 nm.