반응성DC마그네트론스퍼터링으로Fe3O4박막제조에관한연구

We investigated the effects of deposition conditions on the fabrication of Fe3O4 thin films using a reactive DC magnetron sputtering at room temperature. The structural, electrical, and magnetic properties of Fe oxide films dependence on the film thickness, oxygen flow rate, and the substrate crysta...

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Bibliographic Details
Published in대한금속재료학회지 Vol. 47; no. 6; pp. 378 - 382
Main Authors 정민경, Min Kyung Jung, 박성민, Sung Min Park, 박대원, Dae Won Park, 이성래, Seong Rae Lee
Format Journal Article
LanguageKorean
Published 대한금속재료학회 22.06.2009
Subjects
Fe3O4 film
half metallic reactive sputtering
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Summary:We investigated the effects of deposition conditions on the fabrication of Fe3O4 thin films using a reactive DC magnetron sputtering at room temperature. The structural, electrical, and magnetic properties of Fe oxide films dependence on the film thickness, oxygen flow rate, and the substrate crystallinity were also studied. We have successfully fabricated Fe3O4 film with thickness of about 10 nm under optimal reactive sputtering conditions. The saturation magnetization, resistivity, and Verwey transition of the Fe3O4 film were 298 emu/cc, 4.0×10(-2) Ωcm, and 125 K, respectively. (Received February 3, 2009)
Bibliography:The Korean Institute of Metals and Materials
ISSN:1738-8228