Synthesis and Characterization of Multilayer CrN/ZrN Coatings

In this study, multilayer CrN/ZrN coatings with various bi-layer periods (Δ) were deposited by closed-field unbalanced magnetron sputtering and their compositions, crystalline structures and morphologies were characterized by auger electron spectroscopy (AES), X-ray diffraction (XRD) and transmissio...

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Bibliographic Details
Published inMetals and materials international Vol. 14; no. 4; pp. 465 - 470
Main Authors Moung Keun Kim, Gwang Seok Kim, Sang Yul Lee
Format Journal Article
LanguageKorean
Published 대한금속재료학회 01.08.2008
Subjects
Bi-Layer period
H3/E2
multilayer CrN/ZrN coating
nano-indentation
wear test
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Summary:In this study, multilayer CrN/ZrN coatings with various bi-layer periods (Δ) were deposited by closed-field unbalanced magnetron sputtering and their compositions, crystalline structures and morphologies were characterized by auger electron spectroscopy (AES), X-ray diffraction (XRD) and transmission electron microscopy (TEM). Additionally, the mechanical properties of the coatings were characterized by nano-indentation and wear tests. The XRD results showed that the diffraction peak of multilayer CrN/ZrN coatings is observable between the CrN (111) and the ZrN (111). This peak has a strong tendency to increase the intensity and sharpen the width as the substrate rotation speed increases, indicating that the grain size of the multilayer CrN/ZrN coatings gradually increases. The hardness of films was dependent on the bi-layer period (Δ), and the maximum hardness and elastic modulus were approximately 31.8 GPa and 321.5 GPa, respectively. Moreover, the results of the wear tests showed that the multilayer CrN/ZrN coatings exhibited greatly improved wear resistance compared to the monolithic CrN coatings.
Bibliography:The Korean Institute of Metals and Materials
ISSN:1598-9623
2005-4149