Regular Paper : The Study for Transient Enhanced Diffusion of Indium and Its Application to 0.13㎛ Logic Devices

Saved in:
Bibliographic Details
Published inTransactions on electrical and electronic materials Vol. 5; no. 6; pp. 211 - 214
Main Authors Jun Ha Lee, Hoong Joo Lee
Format Journal Article
LanguageKorean
Published 한국전기전자재료학회 30.12.2004
Subjects
Calibration
Indium
Logic devices
Simulation
Transient enhanced diffusion
Online AccessGet full text

Cover

More Information
Bibliography:The Korean Institute of Electrical and Electronic Material Engineers
ISSN:1229-7607