Regular Paper : The Methodology of Systematic Global Calibration for Process Simulator

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Bibliographic Details
Published inTransactions on electrical and electronic materials Vol. 5; no. 5; pp. 180 - 184
Main Authors Jun Ha Lee, Hoong Joo Lee
Format Journal Article
LanguageKorean
Published 한국전기전자재료학회 30.10.2004
Subjects
Calibration
Diffusion
Implantation
Process simulation
Silicidation
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Bibliography:The Korean Institute of Electrical and Electronic Material Engineers
ISSN:1229-7607