The Morphology of Patterning with Pseudoplastic Metal Nanoparticle Fluids during Heat TreatmentSupported by the National Natural Science Foundation of China under Grant Nos 51175479 and 51475436, and the Education Department of Henan Province under Grant Nos 13A460725 and 2013GGJS-001

A pseudoplastic metal nanoparticle fluid (PMNF) is used in nanoimprint to fabricate semiconductors and functional devices. The evaporation of the solvent and the sintering of the Au PMNF are investigated. The key parameters, which influence the morphology of patterning, such as the radius of metal p...

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Bibliographic Details
Published inChinese physics letters Vol. 32; no. 12
Main Authors Wang, Wen, Su, Yu-Feng, Liu, Chao-Ran, Li, Dong-Xue, Wang, Pan, Duan, Zhi-Yong
Format Journal Article
LanguageEnglish
Published Chinese Physical Society and IOP Publishing 01.12.2015
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Summary:A pseudoplastic metal nanoparticle fluid (PMNF) is used in nanoimprint to fabricate semiconductors and functional devices. The evaporation of the solvent and the sintering of the Au PMNF are investigated. The key parameters, which influence the morphology of patterning, such as the radius of metal particles, the concentration of metal particles, the Hamaker constant of the solvent, viscosity of the fluids and the evaporation velocity, are analyzed. Based on a two-sphere sintering model, the equations are derived, which represent the relationships between the relative shrinkage and radius of the metal particles, sintering temperature and time. The optimal parameters for the heat treatment are provided in nanoimprint.
ISSN:0256-307X
1741-3540
DOI:10.1088/0256-307X/32/12/128102