Statistical SPICE analysis of a 0.18 /spl mu/m CMOS digital/analog technology during process development

• Published in: ICMTS 2001. Proceedings of the 2001 International Conference on Microelectronic Test Structures (Cat. No.01CH37153) pp. 19 - 23
• Main Authors: Rankin, N.S., Chun Ng, Leang Sern Ee, Boyland, F., Quek, E., Leung Ying Keung, Walton, A.J., Redford, M.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 2001
• Subjects: CMOS technology; Electric variables measurement; Length measurement; Monte Carlo methods; Parameter extraction; Process control; Semiconductor device modeling; SPICE; Statistical distributions; Testing

This paper gives details of a methodology to extract statistical SPICE models on a developing deep sub micron CMOS technology. The approach uses a TCAD framework which integrates process, device, parameter extraction, and statistics software. The TCAD tools are calibrated by physical and electrical...