Optimization of Wafer-Level Low-Impedance Contact CDM Testers

The low-impedance contact CDM (LICCDM) ESD tester can be used for wafer-level CDM testing. However, compared to the industry standard field-induced CDM (FI-CDM), it shows some differences. We investigate solutions to mitigate these differences which are mainly the wafer chuck influence and the probe...

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Bibliographic Details
Published in2020 42nd Annual EOS/ESD Symposium (EOS/ESD) pp. 1 - 6
Main Authors Simicic, Marko, WU, Wei-Min, Jack, Nathan, Tamura, Shinichi, Shimada, Yohei, Sawada, Masanori, Chen, Shih-Hung
Format Conference Proceeding
LanguageEnglish
Published EOS/ESD Association 13.09.2020
Subjects
Current measurement
Dielectric measurement
Dielectrics
Probes
Testing
Thickness measurement
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Summary:The low-impedance contact CDM (LICCDM) ESD tester can be used for wafer-level CDM testing. However, compared to the industry standard field-induced CDM (FI-CDM), it shows some differences. We investigate solutions to mitigate these differences which are mainly the wafer chuck influence and the probe reflections due to matching.