Optimization of Wafer-Level Low-Impedance Contact CDM Testers
The low-impedance contact CDM (LICCDM) ESD tester can be used for wafer-level CDM testing. However, compared to the industry standard field-induced CDM (FI-CDM), it shows some differences. We investigate solutions to mitigate these differences which are mainly the wafer chuck influence and the probe...
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Published in | 2020 42nd Annual EOS/ESD Symposium (EOS/ESD) pp. 1 - 6 |
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Main Authors | , , , , , , |
Format | Conference Proceeding |
Language | English |
Published |
EOS/ESD Association
13.09.2020
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Subjects | |
Online Access | Get full text |
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Summary: | The low-impedance contact CDM (LICCDM) ESD tester can be used for wafer-level CDM testing. However, compared to the industry standard field-induced CDM (FI-CDM), it shows some differences. We investigate solutions to mitigate these differences which are mainly the wafer chuck influence and the probe reflections due to matching. |
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