Plasma bubbles on langmuir probe in inductively coupled plasma

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Published inTrans Black Sea Region Symposium on Applied Electromagnetism p. MEMI_25
Main Authors Ivanov, S.T., Nikolaev, N.I., Thomae, R.W., Klein, H., Hilschert, F.H.
Format Conference Proceeding
LanguageEnglish
Published IEEE 1996
Subjects
Coils
Plasma applications
Plasma devices
Plasma immersion ion implantation
Plasma measurements
Plasma sources
Probes
Radio frequency
Space technology
Thermionic emission
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Author Klein, H.
Ivanov, S.T.
Hilschert, F.H.
Nikolaev, N.I.
Thomae, R.W.
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  surname: Hilschert
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StartPage MEMI_25
SubjectTerms Coils
Plasma applications
Plasma devices
Plasma immersion ion implantation
Plasma measurements
Plasma sources
Probes
Radio frequency
Space technology
Thermionic emission
Title Plasma bubbles on langmuir probe in inductively coupled plasma
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