Plasma bubbles on langmuir probe in inductively coupled plasma
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Published in | Trans Black Sea Region Symposium on Applied Electromagnetism p. MEMI_25 |
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Main Authors | , , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
1996
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Subjects | |
Online Access | Get full text |
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ISBN: | 0780337638 9780780337633 |
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DOI: | 10.1109/AEM.1996.873109 |