Electron neutral elastic collision frequency measurement with the hairpin resonator probe

Electron neutral elastic collision frequency is measured over pressures ranging from 0.1-2.5 Torr in Ar, He, O 2 , Ar-He and Ar- \mathrm {O}_{2} plasmas. Measurements are made with both grounded and fully floating hairpin resonator probes in a symmetric parallel plate capacitively coupled system dri...

Full description

Saved in:
Bibliographic Details
Published in2017 IEEE International Conference on Plasma Science (ICOPS) p. 1
Main Authors Peterson, David J., Shannon, Steven C., Kraus, Philip, Chua, Thai Cheng
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.05.2017
Online AccessGet full text

Cover

More Information
Summary:Electron neutral elastic collision frequency is measured over pressures ranging from 0.1-2.5 Torr in Ar, He, O 2 , Ar-He and Ar- \mathrm {O}_{2} plasmas. Measurements are made with both grounded and fully floating hairpin resonator probes in a symmetric parallel plate capacitively coupled system driven at 13 MHz. Results are compared to hybrid plasma equipment module (HPEM) simulations, showing good agreement with simulated collision frequency. Results between grounded and floating probes are also compared.
ISSN:2576-7208
DOI:10.1109/PLASMA.2017.8496341