Mathematical modelling and measurement of etching profile for junction shape in MR read heads

A mathematical model was generated to predict the junction profile between MR element and hard bias element. Etching rates as a function of incident beam angle for relevant materials were experimentally determined for this model.

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Bibliographic Details
Published inIEEE International Magnetics Conference p. DB04
Main Authors Won-Je Jeong, Shong, E.Y., Hahm, H.J., Min, K.-I., Young K. Kim
Format Conference Proceeding
LanguageEnglish
Published IEEE 1999
Subjects
Etching
Mathematical model
Shape measurement
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Summary:A mathematical model was generated to predict the junction profile between MR element and hard bias element. Etching rates as a function of incident beam angle for relevant materials were experimentally determined for this model.
ISBN:0780355555
9780780355552
DOI:10.1109/INTMAG.1999.837395