Alternative processing routes for RAINBOW-type piezoelectric devices
In this work an alternative method for fabricating RAINBOW-type devices is proposed, in which the necessary shape and internal electrode structure are created during sintering. This has been achieved through combining Viscous Processing with silver (I) oxide doping of a soft doped PZT material. The...
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Published in | ISAF 1998. Proceedings of the Eleventh IEEE International Symposium on Applications of Ferroelectrics (Cat. No.98CH36245) pp. 547 - 549 |
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Main Authors | , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
1998
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Subjects | |
Online Access | Get full text |
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Summary: | In this work an alternative method for fabricating RAINBOW-type devices is proposed, in which the necessary shape and internal electrode structure are created during sintering. This has been achieved through combining Viscous Processing with silver (I) oxide doping of a soft doped PZT material. The small difference in sintering shrinkage between low and high silver content compositions has been utilised in laminated structures to produce as-fired curvatures. In addition, the necessary Unimorph structure has been created simultaneously, through engineering a conductive cermet phase. Results from the devices thus produced are shown in terms of sintered microstructure and actuation response. |
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ISBN: | 9780780349599 0780349598 |
ISSN: | 1099-4734 2375-0448 |
DOI: | 10.1109/ISAF.1998.786752 |