Dual mode micromachined electron energy analyser

Analysis of the entire electron spectrum generated by the action of an electron beam on a solid surface can be used to provide full characterisation of the solid in terms of both its morphology and chemical composition. Presently this analysis is performed using several analysing tools, each collect...

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Bibliographic Details
Published inEleventh International Vacuum Microelectronics Conference. IVMC'98 (Cat. No.98TH8382) pp. 30 - 31
Main Authors Johnson, S., El Gomati, M.M.
Format Conference Proceeding
LanguageEnglish
Published IEEE 1998
Subjects
Character generation
Chemical analysis
Electron beams
Electron emission
Electron optics
Optical devices
Performance analysis
Solids
Stimulated emission
Surface morphology
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Summary:Analysis of the entire electron spectrum generated by the action of an electron beam on a solid surface can be used to provide full characterisation of the solid in terms of both its morphology and chemical composition. Presently this analysis is performed using several analysing tools, each collecting electrons from different regions of the spectrum. This report discusses a single micromachined analyser which can be operated in two regions of the emission spectrum, namely the secondary electron region, including Auger electrons, and the high energy backscattered electron region. Such miniaturisation of electron optical devices will result in improvement of the optical performance through the reduction of third order aberrations while the corresponding loss of mass and volume will allow for charged particle analysis in previously inaccessible environments, e.g. in the exploration of our solar system.
ISBN:9780780350960
0780350960
DOI:10.1109/IVMC.1998.728623