Plasma packet propagation in microchannels

Summary form only given. The temporal and spatial evolution of low temperature plasma packets has been examined in microchannels fabricated in nanoporous alumina (Al 2 O 3 ). Patterned by conventional photolithographic techniques, microchannels having width of 200 ~ 250 μm and depth of 110 ~ 120 μm...

Full description

Saved in:
Bibliographic Details
Published in2014 IEEE 41st International Conference on Plasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BEAMS) p. 1
Main Authors Hee Jun Yang, Jin Hoon Cho, Sung-Jin Park, Eden, J. Gary
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.05.2014
Subjects
Computers
Educational institutions
Geometry
Microchannels
Plasma temperature
Spirals
Online AccessGet full text

Cover

More Information
Summary:Summary form only given. The temporal and spatial evolution of low temperature plasma packets has been examined in microchannels fabricated in nanoporous alumina (Al 2 O 3 ). Patterned by conventional photolithographic techniques, microchannels having width of 200 ~ 250 μm and depth of 110 ~ 120 μm were etched and various channel arrangements (such as spirals, intersecting sinusoids, and "switchyard" geometries) have been tested successfully. Plasma propagation is monitored by a gated, intensified CCD detector that views the channels through a planar ITO electrode. Experiments with Ne at 500 Torr reveal plasma packets that propagate within the channels at velocities as large as several tens of km-s -1 . The fundamental processes responsible for this behavior, as well as potential applications of specific microchannel array geometries, will be discussed.
ISBN:9781479927111
1479927112
ISSN:0730-9244
2576-7208
DOI:10.1109/PLASMA.2014.7012595